Oxide-confined VCSELs fabricated with a simple self-aligned process flow

被引：5

作者：

Marigo-Lombart, L. ^{[1
,2
]}

Calvez, S. ^{[1
]}

Arnoult, A. ^{[1
]}

Thienpont, H. ^{[2
]}

Panajotov, K. ^{[2
]}

Almuneau, G. ^{[1
]}

机构：

[1] Univ Toulouse, CNRS, LAAS, Toulouse, France

[2] Vrije Univ Brussel, Dept Appl Phys & Photon TW TONA, Pl Laan 2, B-1050 Brussels, Belgium

来源：

SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 2017年 / 32卷 / 12期

关键词：

VCSEL; self-aligned; oxidation; LASERS;

D O I：

10.1088/1361-6641/aa90ae

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We propose a simplified and easier fabrication process flow for the manufacturing of AlOx-confined vertical-cavity surface-emitting lasers (VCSELs) based on combining the oxidation step with a self-aligned process, allowing the mesa etching and two successive lift-off steps based on a single lithography step. The electro-optical confinement achieved by standard lateral oxidation enables a low threshold and a single mode behavior for the VCSEL. This simplified process can largely improve VCSEL manufacturing by reducing the processing time and costs compared to the standard VCSEL process.

引用

页数：4

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