Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with different materials by MEMS Technology

被引：1
|
作者：
Chi, Pengcheng [1 ]
Zhang, Weiping [1 ]
Chen, Wenyuan [1 ]
Li, Hongyi [2 ]
Meng, Kun [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Res Inst Micro Nano Technol, Natl Key Lab Micro Nano Fabricat Technol, Shanghai 200030, Peoples R China
[2] Chinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China
来源：
MATERIALS PROCESSING TECHNOLOGY, PTS 1-4 | 2011年 / 291-294卷
关键词：
Mechanical; Microrobot; MEMS technology;
D O I：
10.4028/www.scientific.net/AMR.291-294.3135
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper presents a feasibility step in the development of biomimetic microrobotic insects. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. A flapping-wing flying M EMS concept and design inspired from insects is first described. Then different kinds of materials used feasibly for flapping-wing microrobotic insect by MEMS technology, such as SU-8, Titanium alloy and Parylene-C, are discussed. And artificial insect wings and thoraxs with different materials by MEMS Technology are fabricated and analyzed. Finally, summarize the paper and propose future research priorities.
引用
收藏
页码：3135 / +
页数：2
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