Studies of diamond-like and nitrogen-containing diamond-like carbon using laser Raman spectroscopy

Diamond-like carbon (a-C and a-C:H) and nitrogen-containing diamond-like carbon (a-C:N and a-C:N:H) films were deposited using ion-beam sputter deposition and r.f plasma-enhanced chemical vapor deposition (PECVD) techniques, and studied by laser Raman spectroscopy. The Raman spectra were deconvoluted to D and G bands using lorentzian and gaussian line shapes. Both line shapes were found to produce consistent results. The Raman parameters, including the intensity ratios (I(D)/I(G)), band positions and bandwidths, were obtained. The Raman spectra of nitrogen-containing and nitrogen-free diamond-like carbon films were found to be different in terms of the Raman parameters. The differences originated from the incorporation of nitrogen into diamond-like carbon. The Raman spectra of various carbons were also analyzed systematically.