Electrochemical Formation of Free-Standing 3D Structures Using Injection of Additives

被引:3
|
作者
Huang, Q. [1 ,2 ]
Gyorgak, R. [1 ]
Pak, R. [3 ]
机构
[1] Univ Alabama, Dept Chem & Biol Engn, Tuscaloosa, AL 35487 USA
[2] Univ Alabama, Ctr Mat Informat Technol, Tuscaloosa, AL 35487 USA
[3] Univ Alabama, Dept Mech Engn, Tuscaloosa, AL 35487 USA
基金
美国国家科学基金会;
关键词
QUARTZ-CRYSTAL MICROBALANCE; TEMPLATE-FREE METHOD; HIGH-ASPECT-RATIO; POLYETHYLENE-GLYCOL; COPPER DEPOSITION; SILICON VIAS; ELECTRODEPOSITION; NICKEL; MICROFABRICATION; MICROTUBULES;
D O I
10.1149/2.1521712jes
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
A new method of electrochemical formation of free-standing 3D structures based on the injection of additives that controls the deposition rate was demonstrated using copper-chloride-polyethylene glycol as an example. A densely-packed defect-free pillar was formed upon the injection of chloride-free electrolyte into a chloride-containing electrolyte, where copper deposition was fully suppressed. The effects of diffusion coefficient, injection rate and the distance between injection nozzle and pillar top were evaluated with numerical simulation. A fast diffusion species, a moderate injection rate and a small gap between injection and pillar were found beneficial to obtaining the best contrast in the growth rates between pillar and background. The demonstration of free-standing copper structure in this paper provides an alternative path for electrochemical 3D printing of various metallic materials. (C) The Author(s) 2017. Published by ECS. All rights reserved.
引用
收藏
页码:D737 / D743
页数:7
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