12-bit MicroElectroMechanical Digital-to-Analog Converter of displacement: design, fabrication and characterization

被引：0

作者：

Sarajlic, Edin ^{[1
]}

Collard, Dominique ^{[2
]}

Toshiyoshi, Hiroshi ^{[1
]}

Fujita, Hiroyuki ^{[1
]}

机构：

[1] Univ Tokyo, IIS, CIRMM, Tokyo 1138654, Japan

[2] Univ Tokyo, LIMMS, CNRS, IIS, Tokyo, Japan

来源：

PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2 | 2007年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A MicroElectroMechanical Digital-to-Analog Converter (MEMDAC) converts an input binary code into an output displacement proportional to the analog value given by the input code. We present a MEMDAC with improved kinematic design that allows large in-plane displacement range and high positioning resolution while making microfabrication process less critical. A 12-bit MEMDAC is successfully fabricated and operated demonstrating a positioning resolution better than 3 nm and a total stroke of 8.57 mu m at a driving voltage of 45 V. These features make it an attractive candidate for diverse applications in which open-loop positioning with high resolution, stability and repeatability are beneficial.

引用

页码：666 / +

页数：2

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