Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors

被引：41

作者：

Seo, Duckbong ^{[1
]}

Jung, Sunghoon ^{[1
]}

Lombardo, Stephen J. ^{[1
]}

Feng, Z. C. ^{[1
]}

Chen, J. K. ^{[1
]}

Zhang, Yuwen ^{[1
]}

机构：

[1] Univ Missouri, Dept Mech & Aerosp Engn, Columbia, MO 65211 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2011年 / 165卷 / 02期

关键词：

Heat flux sensor; Polymer derived ceramics; Ceramic thin film; SICN; MEMS; MICROSTRUCTURES; ENVIRONMENT;

D O I：

10.1016/j.sna.2010.11.013

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we describe the fabrication of ceramic thin films for high-temperature heat flux sensors. The polymer-derived ceramic (PDC) thin films are prepared by using soft lithography on pre-ceramic polymer precursors followed by pyrolysis and heat treatment. Processing routes have been developed which lead to thin film resistance-thermal detectors (RTD) that have sufficient mechanical strength for handling and for use in thermal sensing. The effect of annealing temperatures on the electric resistivity of the PDC sensors was investigated. The electrical resistivity of the sensors was measured at different temperatures. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：250 / 255

页数：6

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