Laser Two-Photon Polymerization Micro- and Nanostructuring Over a Large Area on Various Substrates

A tightly focused ultrafast pulsed laser beam is guided into the volume of the photosensitive material and induces nonlinear photomodification. By translating the sample, the position of the focus is changed relatively, thus point-by-point complex 3D structures can be written inside the bulk. In this report, we present a Laser Two-Photon Polymerization (LTPP) setup for three-dimensional micro/nanostructuring for applications in photonics, microoptics, micromechanics, microfluidics and biomedicine. This system enables fabrication of functional devices over a large area (up to several cm in lateral size) with reproducible sub-micrometer resolution (up to 200 nm). In our experiments a Yb:KGW active media laser oscillator (75 fs, 200 kW, 515 nm frequency doubled, 80 MHz) was used as an irradiation source. The sample was mounted on XYZ wide range linear motor driven positioning stages having 10 nm positioning resolution. These stages enable an overall travelling range of 100 mm into X and Y directions and 50 mm in Z direction and support a linear scanning speed of up to 300 mm/s. Control of all the equipment was automated via custom made computer software "3D-Poli" specially designed for LTPP applications. The model of the structure can be imported as CAD file, this enables rapid and flexible structuring out of various photopolymers like ORMOCERs, ORMOSILs, acrylates and PEGDAs which are commonly used in conventional UV mask, nanoimprint and mu-stereolithographies. In this paper, we demonstrate polymeric microstructures fabricated over a large area on glass, plastic and metal substrates. This opens a way to produce functional devices like photonic crystals, microlenses, micromechanic and microfluidic components and artificial scaffolds as templates for cell growth. Additionally, results of primary myogenic stem cells expanding on microfabricated polymeric scaffolds are provided. Cell proliferation tests show the material and structure to be biocompatible for the biomedical practice.