Plasma-surface interactions

被引：76
|
作者：
Chang, JP [1 ]
Coburn, JW
机构：
[1] Univ Calif Los Angeles, Dept Chem Engn, Los Angeles, CA 90095 USA
[2] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2003年 / 21卷 / 05期
关键词：
D O I：
10.1116/1.1600452
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Over the past decades, our understanding of the fundamental processes occurring in the plasma and at plasma-material interfaces has evolved from being macroscopic and phenomenological to microscopic and mechanistic. This article aims to provide an overview of the evolution of our understanding of several interesting and important phenomena associated with plasma-surface interactions and suggest some future applications of plasma. (C) 2003 American Vacuum Society.
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页码：S145 / S151
页数：7
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