Photoacoustic Spectroscopy for Trace Vapor Detection and Molecular Discrimination

被引:1
|
作者
Holthoff, Ellen [1 ]
Bender, John [1 ]
Pellegrino, Paul [1 ]
Fisher, Almon [2 ]
Stoffel, Nancy [2 ]
机构
[1] USA, Res Lab, 2800 Powder Mill Rd, Adelphi, MD 20783 USA
[2] Infoton Technol Ctr, Canandaigua, NY 14424 USA
关键词
Photoacoustic spectroscopy; sensor; quantum cascade laser; MEMS; MINIATURIZATION; INTEGRATION;
D O I
10.1117/12.850118
中图分类号
TP7 [遥感技术];
学科分类号
081102 ; 0816 ; 081602 ; 083002 ; 1404 ;
摘要
Photoacoustic spectroscopy (PAS) is a useful monitoring technique that is well suited for trace gas detection. This method routinely exhibits detection limits at the parts-per-million (ppm) or parts-per-billion (ppb) level for gaseous samples. PAS also possesses favorable detection characteristics when the system dimensions are scaled to a microsystem design. Current research utilizes quantum cascade lasers (QCLs) in combination with micro-electromechanical systems (MEMS)-scale photoacoustic cell designs. This sensing platform has provided favorable detection limits for a standard nerve agent simulant. The objective of the present work is to demonstrate an extremely versatile MEMS-scale photoacoustic sensor system that is able to discriminate between different analytes of interest.
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页数:7
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