Scanning X-ray microscope

被引：0
|
作者：
Schelokov, IA [1 ]
Roshchupkin, DV [1 ]
Irzhak, DV [1 ]
Kondakov, AS [1 ]
机构：
[1] Russian Acad Sci, Inst Microelect Technol & Ultrahigh Pur Mat, Chernogolovka 142432, Moscow Oblast, Russia
来源：
CRYSTALLOGRAPHY REPORTS | 2004年 / 49卷
关键词：
D O I：
暂无
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
The first results of studying the characteristics of the scanning X-ray microscope for a laboratory X-ray source are reported. The rnicroscope is based on multilevel grazing-incidence Fresnel lenses in the Kirk-patrick-Baez scheme. Presently, the functioning prototype of the scanning X-ray microscope has the following characteristics: the spatial resolution is 3 x 6 mum(2), the maximum scanning field is 1 x 1 cm(2), and the minimum scanning step is 0.2 mum. The important feature of this device is the significant depth resolution (similar to1 mm). This feature makes it possible to use the developed scanning X-ray microscope for investigation of thick samples and, with the appropriate instrumental and software equipment, to carry out microtomography of various objects. (C) 2004 MAIK "Nauka/Interperiodica".
引用
收藏
页码：S170 / S173
页数：4
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