Multilayer Thin-Film Capacitors Fabricated by Radio-Frequency Magnetron Sputtering

In this study, we fabricate multilayer ceramic capacitors (MLCCs) composed of BaTiO3 (BT) dielectric layers with Pt internal electrodes by radio frequency magnetron sputtering. We deposited BT layers with thickness of approximately 300 nm on Pt/Ti-coated SiO2/Si substrates through a movable shadow mask. The isolated internal Pt electrodes are prepared by sliding the shadow mask. Multilayered BT thin films are uniformly deposited on a Si substrate with external electrodes on both sides of the BT films. The formation of a polycrystalline perovskite structure was confirmed by XRD measurement. The MLCCs with five BT layers exhibit excellent dielectric properties: a relative dielectric constant of approximately 320 and a dielectric loss of around 2% regardless of the number of dielectric layers.