Wet Silicon Bulk Micromachined THz Waveguides for Low-Loss Integrated Sensor Applications

被引：0
|
作者：
Matvejev, V. [1 ]
De Tandt, C. [1 ]
Ranson, W. [1 ]
Stiens, J. [1 ]
机构：
[1] Vrije Univ Brussel, Lab Micro & Photoelect, B-1050 Brussels, Belgium
来源：
35TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ 2010) | 2010年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Wet Si bulk micromachining enables producing hexagonally shaped waveguides (WH) with superior performance and are applicable to low THz frequency range. We discuss the fabrication process, hexagonal cross-section analysis, and balance between loss mitigation and operational frequency band of WH.
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页数：2
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