Optical functions of AlAsSb characterized by spectroscopic ellipsometry

被引:3
|
作者
Mozume, T. [1 ]
Tanaka, M. [2 ]
Yoshimi, A. [2 ]
Susaki, W. [2 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan
[2] Osaka Electrocommun Univ, Osaka 5728530, Japan
关键词
D O I
10.1002/pssa.200777811
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Nominally undoped AlAsxSb1-x layers with a thickness of 200 nm to 370 nm and arsenic mole fraction x of 0.325-0.872 were grown on Fe-doped (001) InP substrates by solid-source molecular beam epitaxy. Their optical properties were investigated over a wide photon range of 0.7 eV to 5 eV at room temperature using variable angle spectroscopic ellipsometry. The obtained data were analyzed using standard multilayer calculation schemes. The determined thicknesses of these layers were in good agreement with the calibrated normal growth rate. For photon energies below the AlAsSb band gap, which is the transparency region of the AlAsSb layer, pronounced Fabry-Perot interference oscillations due to the multiple internal reflections in the AlAsSb layer were observed. A clear blue shift of the energy gap of AlAsSb was observed as the As concentration increased. The refractive index decreased with an increase of the bandgap energy in the energy range of 0.7 eV to 2.1 eV. This trend is the same as that observed in conventional III-V alloy semiconductors. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:872 / 875
页数:4
相关论文
共 50 条
  • [1] Optical anisotropy of wurtzite GaN on sapphire characterized by spectroscopic ellipsometry
    Lian, CX
    Li, XY
    Liu, J
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2004, 19 (03) : 417 - 420
  • [2] The optical and structural properties of AlN thin films characterized by spectroscopic ellipsometry
    Joo, HY
    Kim, HJ
    Kim, SJ
    Kim, SY
    [J]. THIN SOLID FILMS, 2000, 368 (01) : 67 - 73
  • [3] Optical anisotropy and porosity of anodic aluminum oxide characterized by spectroscopic ellipsometry
    Kooij, ES
    Wormeester, H
    Gâlca, AC
    Poelsema, B
    [J]. ELECTROCHEMICAL AND SOLID STATE LETTERS, 2003, 6 (11) : B52 - B54
  • [4] Adsorption of polyethyleneimine characterized by spectroscopic ellipsometry
    Zhao, Xiubo
    Pan, Fang
    Lu, Jian R.
    [J]. PROGRESS IN NATURAL SCIENCE-MATERIALS INTERNATIONAL, 2005, 15 : 56 - 59
  • [5] Temperature-dependent optical properties of AlN films characterized by spectroscopic ellipsometry
    Lin Shu-Yu
    Wu Feng
    Chen Chang-Qing
    Liang Yi
    Wan Ling-Yu
    Feng Zhe-Chuan
    [J]. JOURNAL OF INFRARED AND MILLIMETER WAVES, 2017, 36 (03) : 276 - +
  • [6] DETERMINATION OF THE OPTICAL FUNCTIONS OF TRANSPARENT GLASSES BY USING SPECTROSCOPIC ELLIPSOMETRY
    JELLISON, GE
    SALES, BC
    [J]. APPLIED OPTICS, 1991, 30 (30): : 4310 - 4315
  • [7] INP ON SI SUBSTRATES CHARACTERIZED BY SPECTROSCOPIC ELLIPSOMETRY
    ZWINGE, G
    ZIEGENMEYER, I
    WEHMANN, HH
    TANG, GP
    SCHLACHETZKI, A
    [J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (09) : 5889 - 5891
  • [9] The characterization of the optical functions of BCP and CBP thin films by spectroscopic ellipsometry
    Liu, ZT
    Kwong, CY
    Cheung, CH
    Djurisic, AB
    Chan, Y
    Chui, PC
    [J]. SYNTHETIC METALS, 2005, 150 (02) : 159 - 163
  • [10] Swelling of zwitterionic polymer films characterized by spectroscopic ellipsometry
    Tang, Y
    Lu, JR
    Lewis, AL
    Vick, TA
    Stratford, PW
    [J]. MACROMOLECULES, 2001, 34 (25) : 8768 - 8776