Electron emission behaviors of polycrystalline-diamond-coated silicon emitters

被引:7
|
作者
Yang, SH [1 ]
Yokoyama, M [1 ]
机构
[1] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
关键词
field emission array; Fowler-Nordheim emission; threshold voltage; effective work function;
D O I
10.1143/JJAP.38.209
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this work the electron emission characteristics of the polycrystalline-diamond-coated silicon field emission array (DSFEA) are examined, and its emission behavior is compared with that of the bare Si field emission array (SFEA). For the DSFEA, a linear ohmic and a Fowler-Nordheim (FN) emission are observed in the low- and high-applied-voltage regions, respectively. The threshold voltage for DSFEA is 235 V. The maximum emission current of 0.23 mA is obtained at an applied voltage of 500 V. Using the FN plot, the effective work function of DSFEA is calculated to be 0.2115 eV. The emission properly of DSFEA in threshold voltage lowering is attributed to the structural defects in the diamond film, i.e., graphite inclusions, grain boundaries and surface protrusions of the diamond film.
引用
收藏
页码:209 / 212
页数:4
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