Self-Aligned Coplanar a-IGZO TFTs and Application to High-Speed Circuits

被引：148

作者：

Kang, Dong Han ^{[1
,2
]}

Kang, In ^{[1
,2
]}

Ryu, Sang Hyun ^{[1
,2
]}

Jang, Jin ^{[1
,2
]}

机构：

[1] Kyung Hee Univ, Dept Informat Display, Seoul 130701, South Korea

[2] Kyung Hee Univ, Adv Display Res Ctr, Seoul 130701, South Korea

来源：

IEEE ELECTRON DEVICE LETTERS | 2011年 / 32卷 / 10期

关键词：

Amorphous indium-gallium-zinc-oxide (a-IGZO); coplanar; ring oscillator (RO); self-aligned process; thin-film transistor (TFT); THIN-FILM TRANSISTORS; GA-ZN-O; RESISTANCE;

D O I：

10.1109/LED.2011.2161568

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report a self-aligned coplanar amorphous indium-gallium-zinc-oxide (a-IGZO) thin-film transistor (TFT) using an a-IGZO/SiO2 stack layer. From the channel-length dependence of the total resistance for the TFTs, the channel and parasitic resistances were found to be 8.4 k Omega/mu m and 9.7 k Omega/sq, respectively. The fabricated a-IGZO TFT exhibits field-effect mobility of 23.3 cm(2)/V . s, threshold voltage of 3.6 V, and gate voltage swing of 203 mV/dec. A 23-stage ring oscillatormade of the self-aligned TFTs exhibits a propagation delay time of 17 ns/stage at a supply voltage of 22 V.

引用

页码：1385 / 1387

页数：3

共 50 条

[1] High-Speed and Low-Voltage-Driven Shift Register With Self-Aligned Coplanar a-IGZO TFTs
Geng, Di
Kang, Dong Han
Seok, Man Ju
Mativenga, Mallory
Jang, Jin
IEEE ELECTRON DEVICE LETTERS, 2012, 33 (07) : 1012 - 1014
[2] Highly stable self-aligned coplanar a-IGZO TFTs under high temperature stress
Lee, Jiseob
Lee, Suhui
Jeong, Duk Young
Jang, Jin
2018 9TH INTHERNATIONAL CONFERENCE ON COMPUTER AIDED DESIGN FOR THIN-FILM TRANSISTORS (CAD-TFT), 2018, : 8 - 8
[3] Circuits and AMOLED display with self-aligned a-IGZO TFTs on polyimide foil
Nag, Manoj
Bhoolokam, Ajay
Smout, Steve
Willegems, Myriam
Muller, Robert
Myny, Kris
Schols, Sarah
Ameys, Marc
Genoe, Jan
Tung Huei Ke
Vicca, Peter
Ellis, Tim
Cobb, Brian
Kumar, Abhishek
van der Steen, Jan-Laurens P. J.
Gelinck, Gerwin
Fukui, Yusuke
Obata, Koji
Groeseneken, Guido
Heremans, Paul
Steudel, Soeren
JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, 2014, 22 (10) : 509 - 517
[4] Channel Length Dependent Bias-Stability of Self-Aligned Coplanar a-IGZO TFTs
Ha, Su Hwa
Kang, Dong Han
Kang, In
Han, Ji Ung
Mativenga, Mallory
Jang, Jin
JOURNAL OF DISPLAY TECHNOLOGY, 2013, 9 (12): : 985 - 988
[5] Effects of Multi-Gates on Performance and Stability of Self-Aligned Coplanar a-IGZO TFTs
Han, Jiung
Kang, Donghan
Jang, Jin
IDW/AD '12: PROCEEDINGS OF THE INTERNATIONAL DISPLAY WORKSHOPS, PT 1, 2012, 19 : 413 - 416
[6] Effect of Oxygen Partial Pressure on the Performance of a-IGZO TFTs with a Self-Aligned Top-Gate Coplanar Structure
Ryu, Sang Hyun
Kang, Dong Han
Park, Youngchul
Kang, In
Jang, Jin
IDW'11: PROCEEDINGS OF THE 18TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2011, : 599 - 602
[7] Implementation of Fully Self-Aligned Homojunction Double-Gate a-IGZO TFTs
He, Xin
Wang, Longyan
Xiao, Xiang
Deng, Wei
Zhang, Letao
Chan, Mansun
Zhang, Shengdong
IEEE ELECTRON DEVICE LETTERS, 2014, 35 (09) : 927 - 929
[8] High-Speed Pseudo-CMOS Circuits Using Bulk Accumulation a-IGZO TFTs
Chen, Yuanfeng
Geng, Di
Mativenga, Mallory
Nam, Hyoungsik
Jang, Jin
IEEE ELECTRON DEVICE LETTERS, 2015, 36 (02) : 153 - 155
[9] High Performance Inverter with a-IGZO-based Resistor Load and Self-Aligned Coplanar a-IGZO Driving TFT
Geng, Di
Kang, Dong Han
Seok, Man Ju
Mativenga, Mallory
Jang, Jin
IDW/AD '12: PROCEEDINGS OF THE INTERNATIONAL DISPLAY WORKSHOPS, PT 2, 2012, 19 : 879 - 881
[10] Submicrometer Top-Gate Self-Aligned a-IGZO TFTs by Substrate Conformal Imprint Lithography
Ram, Mamidala Saketh
de Kort, Laura
de Riet, Joris
Verbeek, Roy
Bel, Thijs
Gelinck, Gerwin
Kronemeijer, Auke Jisk
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019, 66 (04) : 1778 - 1782

← 1 2 3 4 5 →