Emission characteristics of mixed gas plasmas in low-pressure glow discharges

被引:61
|
作者
Wagatsuma, K [1 ]
机构
[1] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan
关键词
glow discharge; optical emission spectrometry; plasma; excitation mechanisms; mixed gas plasmas;
D O I
10.1016/S0584-8547(01)00184-7
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
Glow discharge optical emission spectrometry (GD-OES) with mixed plasma gases is reviewed. The major topic is the effect of type and content of gases added to an argon plasma on the emission characteristics as well as the excitation processes. Emphasis is placed on argon-helium, argon-oxygen, and argon-nitrogen mixed gas plasmas. Results for non-argon-matrix plasmas, such as neon-helium and nitrogen-helium mixtures, are also presented. Apart from the GD-OES, glow discharge mass spectrometry and furnace atomization plasma emission spectrometry with mixed plasma gases are also discussed. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:465 / 486
页数:22
相关论文
共 50 条
  • [1] LOW-PRESSURE GAS DISCHARGES
    POLMAN, J
    VANTONGEREN, H
    VERBEEK, TG
    [J]. PHILIPS TECHNICAL REVIEW, 1975, 35 (11-1): : 321 - 330
  • [2] TRANSFORMATION OF HYDROCARBONS IN LOW-PRESSURE GLOW-DISCHARGES
    IVANOV, YA
    [J]. HIGH ENERGY CHEMISTRY, 1989, 23 (01) : 67 - 73
  • [3] Sterilization of medical products in low-pressure glow discharges
    Soloshenko, IA
    Tsiolko, VV
    Khomich, VA
    Shchedrin, AI
    Ryabtsev, AV
    Bazhenov, VY
    Mikhno, IL
    [J]. PLASMA PHYSICS REPORTS, 2000, 26 (09) : 792 - 800
  • [4] Sterilization of medical productsin low-pressure glow discharges
    I. A. Soloshenko
    V. V. Tsiolko
    V. A. Khomich
    A. I. Shchedrin
    A. V. Ryabtsev
    V. Yu. Bazhenov
    I. L. Mikhno
    [J]. Plasma Physics Reports, 2000, 26 : 792 - 800
  • [5] PARTICLE THERMOPHORESIS IN LOW-PRESSURE GLOW-DISCHARGES
    JELLUM, GM
    DAUGHERTY, JE
    GRAVES, DB
    [J]. JOURNAL OF APPLIED PHYSICS, 1991, 69 (10) : 6923 - 6934
  • [6] MODELING OF LOW-PRESSURE GAS DISCHARGES
    CHERRINGTON, BE
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (02) : 148 - 155
  • [7] Characteristics of surface glow discharge in a low-pressure supersonic gas flow
    I. V. Schweigert
    [J]. Journal of Experimental and Theoretical Physics, 2010, 110 : 498 - 503
  • [8] Characteristics of surface glow discharge in a low-pressure supersonic gas flow
    Schweigert, I. V.
    [J]. JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 2010, 110 (03) : 498 - 503
  • [9] Simulation benchmarks for low-pressure plasmas: Capacitive discharges
    Turner, M. M.
    Derzsi, A.
    Donko, Z.
    Eremin, D.
    Kelly, S. J.
    Lafleur, T.
    Mussenbrock, T.
    [J]. PHYSICS OF PLASMAS, 2013, 20 (01)
  • [10] Emission and Sputtering Characteristics of Ne-Ar Mixed Gas Glow Discharge Plasmas
    Hyunkook Park
    Machiko Tsukiji
    Kazuaki Wagatsuma
    SangChun Lee
    [J]. Analytical Sciences, 2007, 23 : 1133 - 1136