Lagrange multiplier-based error compensation of heterodyne interferometer

被引：2
|
作者：
Lee, K. [1 ]
Pyo, Y. [1 ]
You, K. [1 ]
机构：
[1] Sungkyunkwan Univ, Dept Elect Engn, Suwon 440746, South Korea
来源：
ELECTRONICS LETTERS | 2016年 / 52卷 / 20期
基金：
新加坡国家研究基金会;
关键词：
error compensation; light interferometers; environmental factors; displacement measurement; capacitive sensors; capacitance measurement; optical sensors; error compensation algorithm; heterodyne laser interferometer; ultraprecise measurement apparatus; environmental error; nanometre-scale measurement accuracy; environmental error factor minimization; Lagrange multiplier method; nanometre-scale measurement; capacitive displacement sensor; MICHELSON;
D O I：
10.1049/el.2016.1815
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The heterodyne laser interferometer is an ultra-precise measurement apparatus. However, its susceptibility to environmental error is an obstacle to improve its nanometre-scale measurement accuracy. To minimise the environmental error factor, a compensation algorithm using a Lagrange multiplier method is proposed. The improved accuracy of the proposed method was verified by means of experiments using nanometre-scale measurements of a capacitive displacement sensor.
引用
收藏
页码：1692 / 1694
页数：2
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