Numerical simulation effect of DMD spatio-temporal characteristic on phase measuring profilometry

被引:0
|
作者
Cao, YP [1 ]
Su, XY [1 ]
Xiang, LQ [1 ]
Chen, WJ [1 ]
Zhang, QC [1 ]
机构
[1] Sichuan Univ, Optoelect Dept, Chengdu 610064, Peoples R China
关键词
digital micro-mirror device(DMD); spatio-temporal characteristic; phase measuring profilometry; three-dimensional sensing; structured illumination;
D O I
10.1117/12.621466
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Digital micro-mirror device(DMD) is a new type of component which integrates with micro-electronics, micro-machinery and micro-optics. It used as a new type of spatial-light modulator will have a wide prospect in optical information processing and structured illumination three-dimensional sensing. The basic principles of DMID and digital light processor(DLP) have been particularly introduced. The spatio-temporal characteristic of DMD has been extensively studied. The effect on the Phase Measuring Profilometry due to the Spatio-temporal characteristic of DMD is discussed by computer simulation. Experiments have approved the validity of the simulation results which can give the guidance for the application of DMD in structured illumination three-dimensional sensing.
引用
收藏
页码:162 / 168
页数:7
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