Uniaxial microscale 3D surface shape measurement based on πphase-shifting method

In this paper, pi phase-shifting method is proposed in the uniaxial microscopic 3D profilometry. Specifically, the pi phase-shifting method uses two fringes with a phase difference of pi, whose subtraction can effectively eliminate the background information and provide a more accurate modulation distribution. Compared with the ten-step phase-shifting method (PSM) and the Fourier transform method (FTM), with only one-fifth of the data acquisition of PSM, the proposed method (PM) can achieve almost the same measurement accuracy as that, but has higher measurement accuracy than FTM. (C) 2021 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement