Properties presented by tin oxide thin films deposited by spray pyrolysis

被引：1
|
作者：
Nunes, P [1 ]
Fortunato, E
Vilarinho, P
Martins, R
机构：
[1] Univ Nova Lisboa, CENIMAT, CEMOP, Fac Sci & Technol,Mat Sci Dept, P-2825114 Caparica, Portugal
[2] Univ Aveiro, UIMC, Dept Ceram & Glass Engn, PT-3810193 Aveiro, Portugal
来源：
POLYCRYSTALLINE SEMICONDUCTORS IV MATERIALS, TECHNOLOGIES AND LARGE AREA ELECTRONICS | 2001年 / 80-81卷
关键词：
deposition conditions; optoelectronic devices; spray pyrolysis; tin oxide;
D O I：
10.4028/www.scientific.net/SSP.80-81.139
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Thin films of SnO(2) deposited by spray pyrolysis as a function of temperature and the carrier gas flow have been produced, in order to evaluate the adequate deposition parameters for application in optoelectronic devices. The characterisation was centred mainly onto the structural, electrical and optical properties of the films. The obtained results showed that the films produced at 450 degreesC and a gas flow of 101/min (as deposited) present an average transmittance (visible spectrum) of 90% and a bulk resistivity of 3.2x 10(-3) Omega CM.
引用
收藏
页码：139 / 143
页数：5
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