Three-dimensional imaging of direct-written photonic structures

被引:17
|
作者
Marshall, Graham D. [1 ]
Jesacher, Alexander [2 ]
Thayil, Anisha [2 ]
Withford, Michael J. [1 ]
Booth, Martin [2 ]
机构
[1] Macquarie Univ, Dept Phys & Astron, MQ Photon Res Ctr, Ctr Ultrahigh Bandwidth Devices Opt Syst, N Ryde, NSW 2109, Australia
[2] Univ Oxford, Dept Engn Sci, Oxford OX1 3PJ, England
基金
澳大利亚研究理事会; 奥地利科学基金会; 英国生物技术与生命科学研究理事会; 英国工程与自然科学研究理事会;
关键词
FEMTOSECOND-LASER; WAVE-GUIDES; HARMONIC-GENERATION; MICROSCOPY; GLASS;
D O I
10.1364/OL.36.000695
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Third-harmonic generation microscopy has been used to analyze the morphology of photonic structures created using the femtosecond laser direct-write technique. Three-dimensional waveguide arrays and waveguide-Bragg gratings written in fused-silica and doped phosphate glass were investigated. A sensorless adaptive-optical system was used to correct the optical aberrations occurring in the sample and microscope system, which had a lateral resolution of less than 500nm. This nondestructive testing method creates volume reconstructions of photonic devices and reveals details invisible to other linear microscopy and index profilometry techniques. (C) 2011 Optical Society of America
引用
收藏
页码:695 / 697
页数:3
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