First X-ray fluorescence excited Kossel diffraction in SEM

被引：6

作者：

Langer, Enrico ^{[1
]}

Haschke, Michael ^{[2
]}

Daebritz, Siegfried ^{[1
]}

机构：

[1] Tech Univ Dresden, Inst Festkorperphys, D-01062 Dresden, Germany

[2] IFG Inst Sci Instruments GmbH, Berlin, Germany

来源：

MICROCHIMICA ACTA | 2008年 / 161卷 / 3-4期

关键词：

Kossel technique; lattice source interferences; polycapillary lens; X-ray fluorescence analysis; Laue method;

D O I：

10.1007/s00604-007-0906-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We present, for the first time, X-ray fluorescence excited Kossel patterns in the scanning electron microscope by way of a compact X-ray tube and a focusing polycapillary lens. Both the diffraction geometry in transmission and in back reflection can be carried out. The way is paved for the advantageous combination of micro-X-ray fluorescence analysis, the Laue method, and the X-ray fluorescence excited Kossel micro-diffraction with the high lateral resolution of the electron microscopy.

引用

页码：455 / 458

页数：4

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