[1] Natl Univ Singapore, Dept Elect & Comp Engn, 4 Engn Dr 3, Singapore 117583, Singapore
[2] Natl Univ Singapore, Ctr Intelligent Sensors & MEMS, E6 05-11F,5 Engn Dr 1, Singapore, Singapore
[3] NUS Suzhou Res Inst NUSRI, Suzhou Ind Pk, Suzhou 215123, Peoples R China
[4] Shanghai Jiao Tong Univ, Dept Micro Nano Elect, Shanghai 200240, Peoples R China
[5] Natl Univ Singapore, Grad Sch Integrat Sci & Engn, Singapore, Singapore