Spectroscopic ellipsometry studies on various zinc oxide films deposited by ion beam sputtering at room temperature

被引：18
|
作者：
Hsu, Jin-Cherng [1 ,2 ]
Lin, Yung-Hsin [2 ]
Wang, Paul W. [3 ]
Chen, Yu-Yun [2 ]
机构：
[1] Fu Jen Catholic Univ, Dept Phys, New Taipei City 24205, Taiwan
[2] Fu Jen Catholic Univ, Grad Inst Appl Sci & Engn, New Taipei City 24205, Taiwan
[3] Bradley Univ, Dept Phys, Peoria, IL 61625 USA
来源：
APPLIED OPTICS | 2012年 / 51卷 / 09期
关键词：
ZNO THIN-FILMS; STRUCTURAL-PROPERTIES; OPTICAL-PROPERTIES; ADSORPTION;
D O I：
10.1364/AO.51.001209
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Various zinc oxide films were deposited by ion-beam sputter deposition (IBSD) under different oxygen partial pressures (P-O2) at room temperature. The as-deposited ZnO films fabricated at P-O2 > 1.0 x 10(-4) Torr had poly-crystalline structures to absorb water on the surface at ambient condition. Simultaneously, the film surfaces were covered and smoothed by the surface layers formed with the water, hydroxyl (OH-) groups, and ZnO materials investigated by X-ray photoelectron spectroscopy (XPS). When the compositions of the surface layers were used in a multilayer fitting model of spectroscopic ellipsometry, the actual optical refractive index of the ZnO film deposited at P-O2 = 1.2 x 10(-4) Torr was found to be about 1.9618 at lambda = 550 nm. (C) 2012 Optical Society of America
引用
收藏
页码：1209 / 1215
页数：7
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