[1] Michigan State Univ, Sch Packaging, Lab Soft Machines & Elect, E Lansing, MI 48824 USA
[2] Michigan State Univ, Dept Mech Engn, E Lansing, MI 48824 USA
[3] Michigan State Univ, Dept Elect & Comp Engn, E Lansing, MI 48824 USA
[4] Duke Univ, Dept Mech Engn & Mat Sci, Durham, NC 27708 USA
[5] Chinese Acad Sci, Beijing Inst Nanoenergy & Nanosyst, Beijing 100083, Peoples R China
[6] Zhejiang Univ, Dept Engn Mech, Key Lab Soft Machines & Smart Devices Zhejiang Pr, Hangzhou 310027, Zhejiang, Peoples R China