Electrical/optical properties of thin transparent oxide films deposited using DC magnetron sputtering.

被引：0
|
作者：
So, BS [1 ]
Kim, SM [1 ]
Pyo, YS [1 ]
Kim, YH [1 ]
Hwang, JH [1 ]
机构：
[1] Hongik Univ, Dept Mat Sci & Engn, Coll Engn, Seoul 121791, South Korea
来源：
DESIGNING, PROCESSING AND PROPERTIES OF ADVANCED ENGINEERING MATERIALS, PTS 1 AND 2 | 2004年 / 449-4卷
关键词：
ITO; electrical; optical; transmission;
D O I：
10.4028/www.scientific.net/MSF.449-452.989
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Amorphous indium. tin oxide (ITO) thin films were grown on plastic substrates, PES (polyethersulfone) using low temperature DC magnetron sputtering. Various post-annealing techniques are attempted to optimize conductivity, transmittance, and roughness: i) conventional thermal annealing, ii) excimer laser annealing, and iii) UV irradiation. The electrical/optical properties were measured using Hall-measurement, DC 4-point resistance measurement, and UV spectrometry along with micro-structural characterization. Optimized UV treatment exhibits enhanced conductivity and smooth surface, compared to those of conventional thermal annealing and excimer laser annealing.
引用
收藏
页码：989 / 992
页数：4
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