Study of phase transformations in the Si67Fe33 thin-film system upon steady-state annealing

被引：0

作者：

Malyshko, A. N. ^{[1
]}

Chaplanov, A. M. ^{[1
]}

Shcherbakova, E. N. ^{[1
]}

机构：

[1] Natl Acad Sci Belarus, Inst Physicotech, Minsk 220141, BELARUS

来源：

JOURNAL OF SURFACE INVESTIGATION | 2011年 / 5卷 / 05期

关键词：

SILICIDES;

D O I：

10.1134/S1027451011100144

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The elemental composition and features of structural and phase transformations in the Si-Fe-Si thin-film system (50-30-50 nm) upon steady-state annealing are studied as functions of the temperature and treatment time by energy-dispersive microanalysis and electron diffraction methods. Optimum annealing parameters for the formation of iron silicide FeSi and disilicide beta-FeSi2 are determined.

引用

页码：996 / 1000

页数：5

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