The growth of CdTe thin film by close space sublimation system

被引:51
|
作者
Alamri, SN [1 ]
机构
[1] King Abdulaziz Univ, Dept Phys, Fac Sci, Madinah, Saudi Arabia
来源
关键词
D O I
10.1002/pssa.200306691
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The effects of source and substrate temperature, ambient gas pressure and the separation between source and substrate on the growth rate of CdTe using the close space sublimation (CSS) system have been investigated. The growth rate increased as the source temperature increased with an activation energy of 1.9 eV and it was constant and independent of the substrate temperature, up to some breakpoint temperature, above which the rate decreased rapidly to zero. Free sublimation and transport is involved at low pressures such as 7.5 x 10(-5) mbar, whereas diffusion-limited transport was involved at pressures of 2 and 6 mbar of N-2. The growth rate increased as the separation between the source and the substrate decreased. The film's grain size increased from <1 mum at 335 degreesC to more than 2.5 mum at above 445 degreesC. Analysis of the XRD traces indicated that the films grown at 335 degreesC were a highly preferred (111) orientation and the (111) texture coefficient reduced when the substrate temperature increased. (C) 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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页码:352 / 360
页数:9
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