Zinc oxide thin film gas sensor for detection of acetone

The sensing behavior of ZnO thin films was investigated towards acetone vapour. The films were prepared on cleaned glass substrates which were mounted on a steel plate kept on an electric heater. The thickness of the films was determined by weighing method and found to be about ∼50nm. The sensing behavior of the film under different concentration levels of acetone were investigated in the temperature range between 250 and 375°C. It was found that the sensitivity of the concentration of acetone was increased from 6.8% to 29.5% as the temperature was raised from 250 to 325°C and then decreased to 22.7% when the temperature was further raised to 375°C.