TOWARDS REALIZATION OF A HIGH-FIDELITY SIMULATION MODEL FOR SHORT-TERM HORIZON FORECASTING IN WAFER FABRICATION FACILITIES

被引：17

作者：

Scholl, Wolfgang ^{[1
]}

Gan, Boon Ping ^{[2
]}

Peh, Ming Li ^{[2
]}

Lendermann, Peter ^{[2
]}

Noack, Daniel ^{[3
]}

Preuss, Patrick ^{[4
]}

Rose, Oliver ^{[3
]}

机构：

[1] Infineon Technol Dresden, Konigsbrucker Str 180, D-01099 Dresden, Germany

[2] DSIMLAB Technol Pte Ltd, Singapore 609431, Singapore

[3] Tech Univ Dresden, Inst Appl Comp Sci, D-01062 Dresden, Germany

[4] DSIMLAB Technol GmbH, D-01099 Dresden, Germany

来源：

PROCEEDINGS OF THE 2010 WINTER SIMULATION CONFERENCE | 2010年

关键词：

D O I：

10.1109/WSC.2010.5678952

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

Discrete Event Simulation (DES) has widely been used for mid and long term forecasting in wafer fabrication plants. But the use of DES for short term forecasting has been limited due to the perceived modelling and computation complexity as well as the and computation complexity as well as the non-steady state nature of today's wafer fab operations. In this paper, we discuss some important modelling issues associated with building an online simulation model. Key elements considered are actual process routes, process and throughput modelling as a function of equipment behavior, lot size, and available processing modules, process dedication at equipment level, equipment downs at mainframe level, estimated lot release strategy, send ahead wafers, dispatch rules, and setup. Typical application areas are proactive dedication management, preventive maintenance scheduling and WIP based sampling optimization.

引用

页码：2563 / 2574

页数：12

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