A new high-frequency surface acoustic wave sensor for humidity measurement

被引：28
|
作者：
Kawalec, Adam [1 ]
Pasternak, Mateusz [1 ]
机构：
[1] Mil Univ Technol, Dept Elect, Inst Radioelect, PL-00908 Warsaw, Poland
来源：
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 2008年 / 57卷 / 09期
关键词：
harmonic oscillators; relative humidity (RH) sensors; surface acoustic wave (SAW) gas sensors;
D O I：
10.1109/TIM.2008.917255
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The relative humidity sensor based on the high-frequency surface acoustic wave (SAW) resonator has been presented in this paper. In the device, a two-port SAW resonator with Nation coating was used. To increase the sensitivity of the sensor, the higher resonator harmonics have been employed. The sensor exhibits a very high sensitivity and linearity as well as relatively short response time. Due to the Nation properties, it is extremely resistant to chemical compound interactions, e.g., it can operate in the atmosphere with sulfur dioxide, acidic and alkaline vapors, strong oxidizing agents, and dust.
引用
收藏
页码：2019 / 2023
页数：5
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