Thermal expansion of GaN and AlN

被引:55
|
作者
Wang, K [1 ]
Reeber, RR [1 ]
机构
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
来源
NITRIDE SEMICONDUCTORS | 1998年 / 482卷
关键词
D O I
10.1557/PROC-482-863
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The temperature dependence of the thermal expansion and the bulk modulus are critical for predicting the residual stress distribution in epitaxial films and provides information relevant for interatomic potentials and equations of state. The thermal expansions of aluminum nitride (AlN) and gallium nitride (GaN) are calculated with two models that employ the limited elastic and lattice parameter data. These semiempirical models allow prediction of the thermal expansions to higher temperatures. Calculated results are compared with experimental data.
引用
收藏
页码:863 / 868
页数:6
相关论文
共 50 条
  • [1] Temperature dependence of the thermal expansion of AlN
    Figge, Stephan
    Kroencke, Hanno
    Hommel, Detlef
    Epelbaum, Boris M.
    APPLIED PHYSICS LETTERS, 2009, 94 (10)
  • [2] Thermal Resistance of GaN/AlN Graded Interfaces
    van Roekeghem, Ambroise
    Vermeersch, Bjorn
    Carrete, Jesus
    Mingo, Natalio
    PHYSICAL REVIEW APPLIED, 2019, 11 (03)
  • [3] On the thermal oxidation of AlInN/AlN/GaN heterostructures
    Eickelkamp, Martin
    Weingarten, Martin
    Khoshroo, Lars Rahimzadeh
    Ketteniss, Nico
    Behmenburg, Hannes
    Heuken, Michael
    Kalisch, Holger
    Jansen, Rolf H.
    Vescan, Andrei
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 8, NO 7-8, 2011, 8 (7-8): : 2213 - 2215
  • [4] THERMAL-EXPANSION OF GAN
    EJDER, E
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1974, 23 (01): : K87 - K90
  • [5] THERMAL-EXPANSION OF ALN, SAPPHIRE, AND SILICON
    YIM, WM
    PAFF, RJ
    JOURNAL OF APPLIED PHYSICS, 1974, 45 (03) : 1456 - 1457
  • [6] Lattice parameters and thermal expansion of GaN
    Robert R. Reeber
    Kai Wang
    Journal of Materials Research, 2000, 15 : 40 - 44
  • [7] Thermal expansion of bulk and homoepitaxial GaN
    Kirchner, V
    Heinke, H
    Hommel, D
    Domagala, JZ
    Leszczynski, M
    APPLIED PHYSICS LETTERS, 2000, 77 (10) : 1434 - 1436
  • [8] Lattice parameters and thermal expansion of GaN
    Reeber, RR
    Wang, K
    JOURNAL OF MATERIALS RESEARCH, 2000, 15 (01) : 40 - 44
  • [9] Temperature dependence of the thermal expansion of GaN
    Roder, C
    Einfeldt, S
    Figge, S
    Hommel, D
    PHYSICAL REVIEW B, 2005, 72 (08)
  • [10] Optimizing interfacial thermal resistance in GaN/AlN heterostructures: The impact of AlN layer thickness
    Xue, Juan
    Li, Fengyi
    Fan, Aoran
    Ma, Weigang
    Zhang, Xing
    INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 2025, 239