Development of the Method of Electron-Optical in Situ Monitoring for Periodic Structures

被引：1
|
作者：
Barabanenkov, M. Yu. [1 ]
Kazmiruk, V. V. [1 ]
Savitskaya, T. N. [1 ]
机构：
[1] Russian Acad Sci, Inst Microelect Technol & High Pur Mat, Moscow 117901, Russia
来源：
JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES | 2010年 / 4卷 / 05期
关键词：
DIFFRACTION GRATINGS; SURFACE;
D O I：
10.1134/S102745101005006X
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
A series of the basic problems for the development of the method of electron-optical in situ monitoring for periodic structures are considered in this work. In particular, the problem of submicron- and nanosized inhomogeneity online monitoring in large areas of tested microelectronic structures with a typical size of the order of 100 mu m is discussed to give individual inhomogeneities in detail. The Riccati equation method has been proposed to solve the problem.
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页码：733 / 739
页数：7
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