Incorporating dimensional analysis and artificial neural networks into achieving process modeling in IC manufacturing

被引：0
|
作者：
Hsieh, Kun-Lin [1 ]
机构：
[1] Natl Taitung Univ, Dept Informat Management, Taitung, Taiwan
来源：
JOURNAL OF SCIENTIFIC & INDUSTRIAL RESEARCH | 2008年 / 67卷 / 07期
关键词：
artificial neural networks; dimensional analysis; dimensionless terms; function approximation;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This study presents applications of dimensional analysis (DA) and artificial neural networks (ANNs) for constructing model in many applications in chemistry, physics and mechanics. An illustrative example for spin coating of thin films in IC manufacturing is employed to demonstrate rationality and effectiveness of proposed approach.
引用
收藏
页码：505 / 511
页数：7
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