Imaging of buried overlay and alignment markers using picosecond acoustic microscopy

被引：0

作者：

Mehendale, Manjusha ^{[1
]}

Antonelli, Andy ^{[1
]}

Mair, Robin ^{[1
]}

Mukundhan, Priya ^{[1
]}

Bogdanowicz, Janusz ^{[2
]}

Blanco, Victor ^{[2
]}

Charley, Anne-Laure ^{[2
]}

Leray, Philippe ^{[2
]}

机构：

[1] Onto Innovat, 16 Jonspin Rd, Wilmington, MA 01887 USA

[2] IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

来源：

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVI | 2022年 / 12053卷

关键词：

Picosecond Acoustic Microscopy (PAM); Picosecond Laser Acoustics (PLA); Alignment and overlay target;

D O I：

10.1117/12.2614295

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Optically opaque materials present a series of challenges for alignment and overlay in the lithography process flow. We demonstrate the efficacy of picosecond acoustic microscopy (PAM) in generating 2D lateral images of structures embedded under opaque layers, including the potential of PAM to generate 3D images by analyzing scanned z planes.

引用

页数：5

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