Molecular dynamics study of surface morphological evolution by cluster impacts

被引：0

作者：

Aoki, T ^{[1
]}

Matsuo, J ^{[1
]}

Yamada, I ^{[1
]}

机构：

[1] Kyoto Univ, Quantum Sci & Engn Ctr, Kyoto 6068501, Japan

来源：

RADIATION EFFECTS AND ION-BEAM PROCESSING OF MATERIALS | 2004年 / 792卷

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In order to understand the characteristics of surface modification process with cluster ion irradiation, molecular dynamics simulations of Ar cluster impacting on Si surface with various surface structures were carried out. It was found that the surface morphology is dynamically deformed with only one cluster impact and the impact process of cluster is different depending on the local surface structure. For example, when an Ar-2000 cluster accelerated with 20keV impacted on the convex point of the surface, the hill was compressed and the impact area was smoothed. At the impact on a concave point, a deeper crater was formed compared with the impact on a flat surface. On the other hand, the MD simulations of sequential impacts of large clusters were performed. It was found that the small tip structures on the surface could be removed easily with cluster irradiation. It was shown that surface roughness converges to 15similar to20Angstrom and this value agrees with the result obtained by single impact of cluster.

引用

页码：497 / 502

页数：6

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