Airflow MEMS array conveyor which provide clean and contact-free manipulations for microtas

We have developed a pneumatic two-dimensional MEMS conveyor, which will be useful for micro chemical or biological analysis systems. By using airflow as a conveyance force, the conveyor can provide clean and contact-free manipulations in the microscopic world. We propose a workbench for the analysis system in which our MEMS device is useful as a conveyor. Moreover, our MEMS device demonstrated conveyance of small objects (3mm x 3mm x 0.1mm silicon chip, weighing approximately 2mg, and small plastic chip 5mm x 5mm x I mm weighting approximately 3 8mg).