Calibration of frictional forces in atomic force microscopy

被引:474
|
作者
Ogletree, DF
Carpick, RW
Salmeron, M
机构
[1] Materials Sciences Division, Lawrence Berkeley Natl. Laboratory, Berkeley
[2] Department of Physics, University of California, Berkeley, CA
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1996年 / 67卷 / 09期
关键词
D O I
10.1063/1.1147411
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The atomic force microscope can provide information on the atomic-level frictional properties of surfaces, but reproducible quantitative measurements are difficult to obtain. Parameters that are either unknown or difficult to precisely measure include the normal and lateral cantilever Force constants (particularly with microfabricated cantilevers), the tip height, the deflection sensor response, and the tip structure and composition at the tip-surface contact. We present an in situ experimental procedure to determine the response of a cantilever to lateral forces in terms of its normal force response. This procedure is quite general. It will work with any type of deflection sensor and does not require the knowledge or direct measurement of the lever dimensions or the tip height. In addition, the shape of the tip apex can be determined. We also discuss a number of specific issues related to force and friction measurements using optical lever deflection sensing. We present experimental results on the lateral force response of commercially available V-shaped cantilevers. Our results are consistent with estimates of lever mechanical properties using continuum elasticity theory. (C) 1996 American Institute of Physics.
引用
收藏
页码:3298 / 3306
页数:9
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