Synthesis and infrared transmittance of curved surface diamond film

被引:0
|
作者
Li, Duo-Sheng [1 ]
Zhou, Xian-Liang [1 ]
Zuo, Dun-Wen [2 ]
Hua, Xiao-Zhen [1 ]
机构
[1] Nanchang Hangkong Univ, Shool Mat Sci & Engn, Nanchang 330063, Peoples R China
[2] Nanjing Univ Aeronaut & Astronaut, Shool Mech & Elect Engn, Nanjing 210016, Peoples R China
来源
关键词
DC-Plasma CVD; Curved surface diamond film; Infrared transmittance; PLASMA-JET CVD; THIN-FILMS; DC; PERFORMANCE;
D O I
10.4028/www.scientific.net/MSF.663-665.320
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The growth of polycrystalline curved surface diamond film using direct current plasma jet CVD (DCPJCVD) is measured by those techniques. The relationships between morphology, microstructure, and film quality are investigated by scanning electron microscopy (SEM) and Raman spectroscopy, Fourier transform infrared spectroscopy (FTIR), respectively. The results show that, after molybdenum substrate was polished by series of diamond powder, atom hydrogen etching, respectively, a much higher nucleation density can be achieved. Synthetic diamond film is compact, continuous and uniform, and diamond film grows with the columnar spreading from the nucleation surface to the growth surface, (I 1 1) faces were dominant in polycrystalline texture diamond film. Raman spectrum indicates that there is only diamond characteristic peak in diamond film, and high quality curved surface diamond film was prepared. IR transmittance of curved surface diamond film in the range of 750 - 4300 cm(-1) reached about 60%. Meantime, the IR transmittance was almost the same in the central and fringe regions of the film. These properties indicate that curved surface diamond film has a promising application in infrared windows and dome.
引用
收藏
页码:320 / +
页数:2
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