Collisionless electron heating in microwave discharges

被引:0
|
作者
Aliev, YM [1 ]
机构
[1] Russian Acad Sci, Lebedev Phys Inst, Moscow 117924, Russia
来源
JOURNAL DE PHYSIQUE IV | 1998年 / 8卷 / P7期
关键词
D O I
10.1051/jp4:1998705
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The problems of collisionless electron heating in microwave discharges are treated under conditions when the electron mean free path is larger than the characteristic space scale of the electric field. In this connection the problem of the so called "collisionless energy dissipation" is discussed. The quasilinear method of kinetic description of a weakly ionized plasma is presented giving the possiblity to take into account collisionless electron heating effects. The cases of inductively and capacitively coupled plasmas are considered. The quasilinear theory of plasma heating is generalized to the case of spatially nonuniform plasmas.
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页码:53 / 60
页数:8
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