Impact of Ge-Sb-Te compound engineering on the set operation performance in phase-change memories

被引:22
|
作者
Boniardi, Mattia [1 ,2 ]
Ielmini, Daniele [1 ,2 ]
Tortorelli, Innocenzo [4 ]
Redaelli, Andrea [4 ]
Pirovano, Agostino [4 ]
Allegra, Mario [4 ]
Magistretti, Michele [4 ]
Bresolin, Camillo [4 ]
Erbetta, Davide [4 ]
Modelli, Alberto [4 ]
Varesi, Enrico [4 ]
Pellizzer, Fabio [4 ]
Lacaita, Andrea L. [1 ,2 ,3 ]
Bez, Roberto [4 ]
机构
[1] Politecn Milan, Dipartimento Elettron & Informaz, I-20133 Milan, Italy
[2] Politecn Milan, IU NET, I-20133 Milan, Italy
[3] CNR, IFN, Sez Politecn Milano, I-20133 Milan, Italy
[4] Micron, Proc R&D, Agrate Brianza, Italy
关键词
Phase-change memory (PCM); Ge-Sb-Te ternary diagram; Chalcogenide material; Composition engineering; Set time performance; Crystallization kinetics; CRYSTALLIZATION; RESISTANCE; RETENTION; MEDIA; DRIFT;
D O I
10.1016/j.sse.2010.11.033
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The phase-change memory (PCM) technology is considered as one of the most attractive non-volatile memory concepts for next generation data storage. It relies on the ability of a chalcogenide material belonging to the Ge-Sb-Te compound system to reversibly change its phase between two stable states. namely the poly-crystalline low-resistive state and the amorphous high-resistive state, allowing the storage of the logical bit. A careful study of the phase-change material properties in terms of the set operation performance, the program window and the electrical switching parameters as a function of composition is very attractive in order to enlarge the possible PCM application spectrum. Concerning the set performance, a crystallization kinetics based interpretation of the observed behavior measured on different Ge-Sb-Te compounds is provided, allowing a physics-based comprehension of the reset-to-set transition. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码:11 / 16
页数:6
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