An optimal OHT dispatching system for 300 mm semiconductor manufacturing

被引：0

作者：

Liu, CY ^{[1
]}

Liao, DY ^{[1
]}

机构：

[1] Ming Chuan Univ, Sch Commun, Taipei, Taiwan

来源：

2004 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN & CYBERNETICS, VOLS 1-7 | 2004年

关键词：

OHT dispatching; 300 mm semiconductor manufacturing; integer programming;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper presents the development of an optimization-based system for OHT (Overhead Hoist Transport) dispatching with blocking effects in 300mm semiconductor manufacturing. The OHT dispatching Problem is first formulated into an integer programming problem with OHT dynamics and location constraints. We adopt the linear programming solver, LINDO, to develop the optimal OHT dispatching system. Numerical results demonstrate that this approach performs well in minimizing the total completion time of transport jobs while minimizing the traveling times of empty but dispatched vehicles. It takes about 6.5 seconds to solve the problems of realistic scale. The developed Optimal OHT dispatching system is effective and applicable in practice.

引用

页码：1631 / 1636

页数：6

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