Effects of N2 Pressure on Properties of Titanium Nitride Films By Filter Cathodic Vacuum Arc for Bipolar Plates in PEM Fuel Cells.

被引：1
|
作者：
Pejchang, D. [1 ]
Medhisuwakul, M. [2 ]
Sansongsiri, S.
机构：
[1] Chiang Mai Univ, Dept Phys & Mat Sci, Chiang Mai 50200, Thailand
[2] Commiss Higher Educ, ThEP Ctr, Bangkok 10400, Thailand
来源：
MECHANICAL AND AEROSPACE ENGINEERING, PTS 1-7 | 2012年 / 110-116卷
关键词：
titanium nitride; bipolar plate; corrosion; interfacial contact resistance; cathodic vacuum arc; DEPOSITION;
D O I：
10.4028/www.scientific.net/AMM.110-116.478
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
This research is aimed to synthesize titanium nitride (TiN) thin films on stainless steel 304 using metal vacuum arc surface coating technique. A titanium rod is used as cathode. Plasma is generated by applying the arc pulse voltage of 450 V between the electrodes in N2 atmosphere. The pressure of N2 is varied from 10-5 to 10-3 torr when compare with uncoated-stainless steel 304. The bias voltage for substrate is -1 kV. Then the properties of the films are investigated. Firstly, microstructures of TiN thin films are indentified by X-ray diffraction method (XRD) and the cross-section scanning electron microscopy (SEM) is used to measure the thickness. Secondly, the corrosion resistance is examined by electrochemical test in 1 M H2SO4 solution at 25 degrees C. The electrical resistivity is analyzed by interfacial contact resistance measurements.
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页码：478 / +
页数：2
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