A laser tracking interferometer based on a new servo system

A laser tracking interferometer based on a new direct drive servo system is introduced in this paper. In the new tracking system. the electric current signal from a position error detector drives the coil in a magnetic field and a reflecting mirror stuck on the coil will rotate certain angle to keep aiming at the target retroreflector. This simplified system obtains high response speed and costs much less. Experiments show that the servo system can track the object with the speed 5m/s as well as the acceleration 10m/s(2). By using several such tracking interferometers. a moving corner retroreflector mounted on CMM has been tracked and the tno dimensional coordinate values of the object have been given.