Topography of micromirror for metal MEMS optical switch based on fractal theory

被引：0
|
作者：
Zhang Yi [1 ]
Luo Yuan [1 ]
Xu Xiaodong [1 ]
机构：
[1] Chongqing Univ Posts & Telecommun, Chongqing 400065, Peoples R China
来源：
DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS | 2007年 / 6724卷
关键词：
MEMS micromirror; fractal; Weierstrass-Mandelbrot function; anisotropism;
D O I：
10.1117/12.782722
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this paper, the topographies of various micro-mirror surfaces are measured by Scanning Tunneling Microscope (STM) based on NiCrAu MEMS optical switch unit which is desined and fabricated by the authors. Fractal theory and Welerstrass-Mandelbrot function is applied to analyze and simulate the topography of different surfaces. The result shows that the surface of MEMS micromirror which is fabricated by metal sputter has low anisotropism and the W-M function is very efficient in creating models and is very useful for analyzing the topography of MEMS surface.
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页数：6
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