Converse flexoelectric effect in comb electrode piezoelectric microbeam

被引：36
|
作者：
Shen, Zhiyuan [1 ]
Chen, Wei [2 ]
机构：
[1] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore
[2] Nanyang Technol Univ, Ctr Microelect, Sch Elect & Elect Engn, Singapore 639798, Singapore
来源：
PHYSICS LETTERS A | 2012年 / 376卷 / 19期
关键词：
Flexoelectricity; Piezoelectricity; PZT; MEMS; Microbeam; LEAD-ZIRCONATE-TITANATE; POLARIZATION; CERAMICS;
D O I：
10.1016/j.physleta.2012.03.049
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
We demonstrate the converse flexoelectric effect in a lead zirconate titanate microbeam. The fringe electric field of a comb electrode induces converse flexoelectric responses in uniformly poled and depoled beams. The simulated electric field distribution shows that bending of the beam is induced by piezoelectric and mu(11), mu(12) flexoelectric coefficients. Simulations indicate that piezoelectric displacement occurs in different directions in the two opposite poled samples while flexoelectric displacement remains the same. This finding is verified by the displacement measurement results. (c) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：1661 / 1663
页数：3
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