Liquid-Crystalline Elastomer Microvalve for Microfluidics

被引:107
|
作者
Sanchez-Ferrer, Antoni [1 ,2 ]
Fischl, Tamas [3 ]
Stubenrauch, Mike [3 ]
Albrecht, Arne [3 ]
Wurmus, Helmut [3 ]
Hoffmann, Martin [3 ]
Finkelmann, Heino [2 ]
机构
[1] ETH, Inst Food Nutr & Hlth, Food & Soft Mat Sci Grp, CH-8092 Zurich, Switzerland
[2] Univ Freiburg, Inst Macromol Chem, D-79104 Freiburg, Germany
[3] Ilmenau Univ Technol, Fac Mech Engn, Dept Micromech Syst, D-98693 Ilmenau, Germany
关键词
TOTAL ANALYSIS SYSTEMS; MEMS MICROVALVE; MAIN-CHAIN; DRIVEN; FABRICATION; VALVE; SILICON; DESIGN; PUMPS; INTEGRATION;
D O I
10.1002/adma.201102277
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Microactuators are an essential component in microsystems or microdevices, and in applications that include artificial muscles, pumps, valves, or switchers. Liquid-crystalline elastomers are a new class of actuator material in the field of microsystem technologies, which can be used in standard processes. This newly developed actuator provides new possibilities in microfluidics because of its dimensional changes activated by the increase in temperature.
引用
收藏
页码:4526 / +
页数:6
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