Magnetic bistable micro-actuator with integrated permanent magnets

被引：29
|
作者：
Dieppedale, C [1 ]
Desloges, B [1 ]
Rostaing, H [1 ]
Delamare, J [1 ]
Cugat, O [1 ]
Meunier-Carus, J [1 ]
机构：
[1] CEA, LETI, F-38054 Grenoble, France
来源：
PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3 | 2004年
关键词：
magnetic actuator; permanent magnet; electroplating;
D O I：
10.1109/ICSENS.2004.1426208
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new magnetic micro-actuator with integrated permanent magnets has been developed. The design of this device with a levitating mobile magnet is a real innovation and is patented. The structure was modeled using analytical and numerical calculations. Furthermore, the fabrication feasibility, using collective micro-technology processes, has recently been demonstrated.
引用
收藏
页码：493 / 496
页数：4
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