A novel integrated fiber-optic interferometer model and its application in micro-displacement measurement

被引：18

作者：

Wang, Chi ^{[1
,2
,3
]}

Xu, Long-long ^{[1
]}

Zhu, Jun ^{[2
]}

Yuan, Zhi-wen ^{[2
]}

Yu, Ying-jie ^{[1
]}

Asundi, Anand K. ^{[4
]}

机构：

[1] Shanghai Univ, Dept Precis Mech Engn, Shanghai 200072, Peoples R China

[2] Sci & Technol Near Surface Detect Lab, Wuxi 214035, Peoples R China

[3] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China

[4] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore 639798, Singapore

来源：

OPTICS AND LASERS IN ENGINEERING | 2016年 / 86卷

基金：

上海市自然科学基金;

关键词：

Self-focusing lens; Fiber optical probe; Interferometer; Micro-displacement; OPTICAL COHERENCE TOMOGRAPHY; NEEDLE PROBE; INDEX; DEVICES; SENSOR; LENS;

D O I：

10.1016/j.optlaseng.2016.05.012

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We conducted an investigation in a novel integrated fiber-optic interferometer model based on ultra small self-focusing optical fiber probe and the method of its application in micro-displacement measurement. Firstly, we proposed the structure model of integrated fiber-optic interferometer and established its input output mathematical model applied in micro-displacement measurement. Secondly, we established the hardware system of the integrated fiber-optic interferometer. Finally, we analyzed the fitting result of experimental data of micro-displacement measurement and some error factors and defined the linear working range. The experimental results indicate that, under the given experimental conditions, the linear measurement range, linearity and sensitivity of the integrated fiber-optic interferometer were 10 mu m, 1.36% and 8.8 mv/mu m respectively. (C) 2016 Elsevier Ltd. All rights reserved.

引用

页码：125 / 131

页数：7

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