Fabrication of polymer waveguide devices for sensor applications

被引：1
|
作者：
Cheng, Mu [1 ]
Hiltunen, Jussi [2 ]
Wang, Meng [1 ]
Suutala, Antti [3 ]
Karioja, Pentti [2 ]
Myllyla, Risto [1 ]
机构：
[1] Univ Oulu, Elect & Informat Engn Dept, Optoelect & Measurement Technol Lab, FI-90014 Oulu, Finland
[2] VTT, Tech Res Ctr Finland, FI-90571 Oulu, Finland
[3] Univ Oulu, Dept Elect & Informat Engn, Microelect & Mat Phys Labs, FI-90014 Oulu, Finland
来源：
LASER APPLICATIONS IN LIFE SCIENCES | 2010年 / 7376卷
关键词：
photolithography; imprinting; polymer waveguide; Bragg grating; MEH-PPV; SURFACE-PLASMON SENSORS;
D O I：
10.1117/12.871119
中图分类号：
Q6 [生物物理学];
学科分类号：
071011 ;
摘要：
The fabrication of polymer based waveguide devices by different methods is investigated in this work including lithographic, imprinting and focused-ion-beam processing. Also, the combination of luminescent substance with waveguide is evaluated to produce integrated optical micro system including both the light source and sensor structure on a single platform.
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页数：6
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